Wafer-scale fabrication of target arrays for stable generation of proton beams by laser-plasma interaction.

Large-scale fabrication of targets for laser-driven acceleration of ion beams is a prerequisite to establish suitable applications, and to keep up with the challenge of increasing repetition rate of currently available high-power lasers. Here we present manufacturing and test results of large arrays of solid targets for TNSA laser-driven ion acceleration. By applying micro-electro-mechanical-system (MEMS) based methods allowing for parallel...