information about Fabrication field
Field Hierarchy
Parent | |||
---|---|---|---|
Medicine 48.2M papers | Pathology 9M papers | Alternative medicine 2.4M papers | |
Current | |||
Fabrication 340k papers | |||
Child | |||
Electron-beam lithography 20.8k papers | Surface micromachining 17.5k papers | Nanolithography 13k papers | Microfabrication 12.6k papers |
X-ray lithography 5,133 papers | Nanoimprint lithography 5,121 papers | Next-generation lithography 4,413 papers | LIGA 3,537 papers |
Gauge factor 3,426 papers | Soft lithography 3,211 papers |
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