information about Fabrication field
Field Hierarchy
Parent | |||
---|---|---|---|
Medicine 50.4M papers | Pathology 9.2M papers | Alternative medicine 2.5M papers | |
Current | |||
Fabrication 352k papers | |||
Child | |||
Electron-beam lithography 21.2k papers | Surface micromachining 18.1k papers | Nanolithography 13.5k papers | Microfabrication 12.8k papers |
X-ray lithography 5,443 papers | Nanoimprint lithography 5,318 papers | Next-generation lithography 4,675 papers | LIGA 4,556 papers |
Gauge factor 3,481 papers | Soft lithography 3,323 papers |
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History