information about Fabrication field
Field Hierarchy
Parent | |||
---|---|---|---|
Medicine 49.4M papers | Pathology 9.1M papers | Alternative medicine 2.4M papers | |
Current | |||
Fabrication 344k papers | |||
Child | |||
Electron-beam lithography 21k papers | Surface micromachining 17.9k papers | Nanolithography 13.3k papers | Microfabrication 12.6k papers |
X-ray lithography 5,391 papers | Nanoimprint lithography 5,245 papers | Next-generation lithography 4,612 papers | LIGA 4,474 papers |
Soft lithography 3,290 papers | Gauge factor 3,281 papers |
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History