Microelectromechanical systems

https://www.wikidata.org/wiki/Q175561

Field Hierarchy

Parent
Physics 33M papers	Materials science 18.5M papers	Quantum mechanics 13.3M papers	Nanotechnology 4.1M papers
Optoelectronics 3.7M papers
Current
Microelectromechanical systems 64.9k papers
Child
Vibrating structure gyroscope 3,461 papers	Proof mass 2,238 papers	Stiction 2,082 papers	Rate integrating gyroscope 957 papers

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History