information about Etching (microfabrication) field
Field Hierarchy
Parent | |||
---|---|---|---|
Chemistry 28.9M papers | Materials science 18.5M papers | Organic chemistry 12.9M papers | Composite material 8.7M papers |
Nanotechnology 4.1M papers | Layer (electronics) 1.4M papers | ||
Current | |||
Etching (microfabrication) 97.4k papers | |||
Child | |||
Reactive-ion etching 18.4k papers | Isotropic etching 14.1k papers | Plasma etching 10.5k papers | Dry etching 10.4k papers |
Deep reactive-ion etching 3,202 papers | Interposer 2,772 papers | Etch pit density 2,372 papers | LOCOS 1,827 papers |
Buffered oxide etch 405 papers |
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History