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information about Etching (microfabrication) field

Etching (microfabrication)

https://www.wikidata.org/wiki/Q2368605
Field Hierarchy
Parent
Chemistry
28.8M papers
Materials science
18.5M papers
Organic chemistry
13M papers
Composite material
8.8M papers
Nanotechnology
4.3M papers
Layer (electronics)
1.4M papers
Current
Etching (microfabrication)
97.6k papers
Child
Reactive-ion etching
18.4k papers
Isotropic etching
14.3k papers
Plasma etching
10.5k papers
Dry etching
10.3k papers
Deep reactive-ion etching
3,204 papers
Interposer
2,944 papers
Etch pit density
2,391 papers
LOCOS
1,555 papers
Buffered oxide etch
398 papers
Trends