information about Etching (microfabrication) field
Field Hierarchy
Parent | |||
---|---|---|---|
Chemistry 29.4M papers | Materials science 18.9M papers | Organic chemistry 13.1M papers | Composite material 8.8M papers |
Nanotechnology 4.2M papers | Layer (electronics) 1.4M papers | ||
Current | |||
Etching (microfabrication) 98.6k papers | |||
Child | |||
Reactive-ion etching 18.5k papers | Isotropic etching 14.3k papers | Plasma etching 10.6k papers | Dry etching 10.5k papers |
Deep reactive-ion etching 3,223 papers | Interposer 2,873 papers | Etch pit density 2,385 papers | LOCOS 1,832 papers |
Buffered oxide etch 408 papers |
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History