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Reactive-ion etching

https://www.wikidata.org/wiki/Q1640159

Field Hierarchy

Parent
Chemistry 28.8M papers	Materials science 18.5M papers	Organic chemistry 13M papers	Composite material 8.8M papers
Nanotechnology 4.3M papers	Layer (electronics) 1.4M papers	Etching (microfabrication) 97.6k papers
Current
Reactive-ion etching 18.4k papers
Child
Deep reactive-ion etching 3,204 papers		Buffered oxide etch 398 papers

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History