Plasma etching

https://www.wikidata.org/wiki/Q2392011

Field Hierarchy

Parent
Chemistry 29.4M papers	Materials science 18.9M papers	Organic chemistry 13.1M papers	Composite material 8.8M papers
Nanotechnology 4.2M papers	Layer (electronics) 1.4M papers	Etching (microfabrication) 98.6k papers
Current
Plasma etching 10.6k papers
Child
Plasma etcher 0 papers	Advanced Silicon Etch 0 papers	Oxygen plasma etching 0 papers

Trends

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History