Dry etching

https://www.wikidata.org/wiki/Q1191918

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Parent
Chemistry 28.4M papers	Materials science 18.2M papers	Organic chemistry 12.8M papers	Composite material 8.6M papers
Nanotechnology 4.2M papers	Layer (electronics) 1.4M papers	Etching (microfabrication) 96.7k papers
Current
Dry etching 10.2k papers
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History