information about Dry etching field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Chemistry 28.9M papers | Materials science 18.5M papers | Organic chemistry 12.9M papers | Composite material 8.7M papers |
Nanotechnology 4.1M papers | Layer (electronics) 1.4M papers | Etching (microfabrication) 97.4k papers | |
| Current | |||
Dry etching 10.4k papers | |||
| Child | |||
Advanced Silicon Etch 0 papers | |||
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History