information about Deep reactive-ion etching field

Deep reactive-ion etching

https://www.wikidata.org/wiki/Q486936
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Parent
Chemistry
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Materials science
19M papers
Organic chemistry
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Composite material
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Nanotechnology
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Layer (electronics)
1.4M papers
Etching (microfabrication)
98.7k papers
Reactive-ion etching
18.5k papers
Current
Deep reactive-ion etching
3,228 papers
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Trends