Deep reactive-ion etching

https://www.wikidata.org/wiki/Q486936

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Chemistry 28.4M papers	Materials science 18.2M papers	Organic chemistry 12.8M papers	Composite material 8.6M papers
Nanotechnology 4.2M papers	Layer (electronics) 1.4M papers	Etching (microfabrication) 96.7k papers	Reactive-ion etching 18.2k papers
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Deep reactive-ion etching 3,194 papers
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