information about Deep reactive-ion etching field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Chemistry 28.8M papers | Materials science 18.5M papers | Organic chemistry 13M papers | Composite material 8.8M papers |
Nanotechnology 4.3M papers | Layer (electronics) 1.4M papers | Etching (microfabrication) 97.6k papers | Reactive-ion etching 18.4k papers |
| Current | |||
Deep reactive-ion etching 3,204 papers | |||
| Child | |||
Trends
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