information about Buffered oxide etch field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Chemistry 29.4M papers | Materials science 18.9M papers | Organic chemistry 13.1M papers | Composite material 8.8M papers |
Nanotechnology 4.2M papers | Layer (electronics) 1.4M papers | Etching (microfabrication) 98.6k papers | Reactive-ion etching 18.5k papers |
| Current | |||
Buffered oxide etch 408 papers | |||
| Child | |||
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