A W-Band Micromachined On-Wafer Probe With Integrated Balun for Characterization of Differential Circuits

Differential circuits are commonly used for millimeter-wave monolithic integrated circuits such as amplifiers and voltage-controlled oscillators. The infrastructure for their characterization, however, remains limited at these frequencies. With the recent development in micromachined on-wafer probes, a probe integrated with balun circuitry can provide a convenient way to characterize differential integrated circuits. In this paper, a...