information about Resist field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Chemistry 28.8M papers | Materials science 18.5M papers | Organic chemistry 13M papers | Composite material 8.8M papers |
Nanotechnology 4.3M papers | Layer (electronics) 1.4M papers | ||
| Current | |||
Resist 50.5k papers | |||
| Child | |||
Electron-beam lithography 20.9k papers | X-ray lithography 5,228 papers | Photomask 4,623 papers | Next-generation lithography 4,523 papers |
Multiple patterning 3,484 papers | Immersion lithography 3,001 papers | Proximity effect (electron beam lithography) 2,612 papers | Computational lithography 1,997 papers |
Maskless lithography 1,979 papers | Stencil lithography 1,583 papers | ||
Trends