information about Resist field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Chemistry 29.4M papers | Materials science 18.9M papers | Organic chemistry 13.1M papers | Composite material 8.8M papers |
Nanotechnology 4.2M papers | Layer (electronics) 1.4M papers | ||
| Current | |||
Resist 52.4k papers | |||
| Child | |||
Electron-beam lithography 21.2k papers | X-ray lithography 5,432 papers | Photomask 4,753 papers | Next-generation lithography 4,662 papers |
Multiple patterning 3,521 papers | Immersion lithography 3,135 papers | Proximity effect (electron beam lithography) 2,958 papers | Maskless lithography 2,024 papers |
Computational lithography 2,006 papers | Stencil lithography 1,660 papers | ||
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History