information about Resist field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Chemistry 28.4M papers | Materials science 18.2M papers | Organic chemistry 12.8M papers | Composite material 8.6M papers |
Nanotechnology 4.2M papers | Layer (electronics) 1.4M papers | ||
| Current | |||
Resist 50.3k papers | |||
| Child | |||
Electron-beam lithography 20.8k papers | X-ray lithography 5,133 papers | Photomask 4,791 papers | Next-generation lithography 4,413 papers |
Multiple patterning 3,599 papers | Immersion lithography 3,184 papers | Proximity effect (electron beam lithography) 2,593 papers | Computational lithography 2,051 papers |
Maskless lithography 1,950 papers | Stencil lithography 1,558 papers | ||
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History