information about Electron-beam lithography field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Medicine 48.2M papers | Chemistry 28.4M papers | Materials science 18.2M papers | Organic chemistry 12.8M papers |
Pathology 9M papers | Composite material 8.6M papers | Nanotechnology 4.2M papers | Alternative medicine 2.4M papers |
Layer (electronics) 1.4M papers | Fabrication 340k papers | ||
| Current | |||
Electron-beam lithography 20.8k papers | |||
| Child | |||
Next-generation lithography 4,413 papers | Proximity effect (electron beam lithography) 2,593 papers | Maskless lithography 1,950 papers | Stencil lithography 1,558 papers |
Hydrogen silsesquioxane 623 papers | |||
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