information about Multiple patterning field
Field Hierarchy
Parent | |||
---|---|---|---|
Chemistry 28.9M papers | Materials science 18.5M papers | Organic chemistry 12.9M papers | Composite material 8.7M papers |
Nanotechnology 4.1M papers | Layer (electronics) 1.4M papers | Resist 51.9k papers | |
Current | |||
Multiple patterning 3,481 papers | |||
Child | |||
Computational lithography 1,974 papers |
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History