information about Immersion lithography field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Chemistry 29.4M papers | Materials science 19M papers | Organic chemistry 13.1M papers | Composite material 8.9M papers |
Nanotechnology 4.2M papers | Layer (electronics) 1.4M papers | Resist 52.5k papers | |
| Current | |||
Immersion lithography 3,136 papers | |||
| Child | |||
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