information about Immersion lithography field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Chemistry 28.4M papers | Materials science 18.2M papers | Organic chemistry 12.8M papers | Composite material 8.6M papers |
Nanotechnology 4.2M papers | Layer (electronics) 1.4M papers | Resist 50.3k papers | |
| Current | |||
Immersion lithography 3,184 papers | |||
| Child | |||
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