information about Next-generation lithography field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Medicine 50.4M papers | Chemistry 29.4M papers | Materials science 19M papers | Organic chemistry 13.1M papers |
Pathology 9.2M papers | Composite material 8.9M papers | Nanotechnology 4.2M papers | Alternative medicine 2.5M papers |
Layer (electronics) 1.4M papers | Fabrication 352k papers | ||
| Current | |||
Next-generation lithography 4,675 papers | |||
| Child | |||
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History