Infrared Spectroscopy for Chemically Specific Sensing in Silicon-Based Microreactors

Fourier transform infrared (FT-IR) spectroscopy in a multiple internal reflection (MIR) geometry is integrated with silicon-based microreactors to allow detection of a wide range of chemical species while taking advantage of inexpensive batch fabrication techniques applicable to silicon substrates. The microreactors are fabricated in silicon and glass using standard microfabrication and selective etching techniques. The small ( approximately 1...