Nanocomposite Ti–Si–N Coatings Deposited by Reactive dc Magnetron Sputtering for Biomedical Applications

Nanocomposite Ti–Si–N coatings were prepared by reactive dc magnetron sputtering in a mixture of Ar and N 2 gases onto bio implantable 316L stainless steel substrates. X‐ray diffraction analysis revealed that the Ti–Si–N nanocomposite coatings are mainly composed of amorphous Si 3 N 4 and TiN crystals. The presence of different phases like TiN , TiO 2 , and Si 3 N 4 was confirmed from X‐ray photoelectron spectroscopy analysis. Raman spectra of...