information about Sputter deposition field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Physics 32.1M papers | Materials science 18.5M papers | Quantum mechanics 13.3M papers | Nanotechnology 4.3M papers |
Thin film 506k papers | Sputtering 129k papers | ||
| Current | |||
Sputter deposition 68.8k papers | |||
| Child | |||
High-power impulse magnetron sputtering 5,305 papers | Pulsed DC 2,022 papers | ||
Trends
Field Trends