information about Sputter deposition field
Field Hierarchy
Parent | |||
---|---|---|---|
Physics 31.7M papers | Materials science 18.2M papers | Quantum mechanics 13.1M papers | Nanotechnology 4.2M papers |
Thin film 502k papers | Sputtering 128k papers | ||
Current | |||
Sputter deposition 68.3k papers | |||
Child | |||
High-power impulse magnetron sputtering 5,198 papers | Pulsed DC 2,016 papers |
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History