Sputter deposition

https://www.wikidata.org/wiki/Q847609

Field Hierarchy

Parent
Physics 33.5M papers	Materials science 18.9M papers	Quantum mechanics 13.5M papers	Nanotechnology 4.2M papers
Thin film 516k papers		Sputtering 131k papers
Current
Sputter deposition 69.3k papers
Child
High-power impulse magnetron sputtering 5,563 papers		Pulsed DC 2,121 papers

Trends

Notes

History