Sputtering

https://www.wikidata.org/wiki/Q898444

Field Hierarchy

Parent
Physics 33.5M papers	Materials science 18.9M papers	Quantum mechanics 13.5M papers	Nanotechnology 4.2M papers
Thin film 516k papers
Current
Sputtering 131k papers
Child
Sputter deposition 69.3k papers	Cavity magnetron 20.2k papers	High-power impulse magnetron sputtering 5,563 papers	Pulsed DC 2,121 papers
Collision cascade 1,189 papers

Trends

Notes

History