Sputtering

https://www.wikidata.org/wiki/Q898444

Field Hierarchy

Parent
Physics 31.7M papers	Materials science 18.2M papers	Quantum mechanics 13.1M papers	Nanotechnology 4.2M papers
Thin film 502k papers
Current
Sputtering 128k papers
Child
Sputter deposition 68.3k papers	Cavity magnetron 19.2k papers	High-power impulse magnetron sputtering 5,198 papers	Pulsed DC 2,016 papers
Collision cascade 1,180 papers

Trends

Notes

History