High-efficiency deposition of 2-in. double-sided YBCO thin films in batch with pulsed inject MOCVD

A special substrate turnplate and a U-type nozzle were designed for efficient producing double-sided YBCO thin films in batch with pulsed inject MOCVD. In this paper, 12 pieces of 500 nm thick YBCO thin films could simultaneously deposited on both sides of 2-in. LaAlO3 single crystalline wafers in less than 4 h, at an average preparation rate of 16 min per piece. Deposited with the same condition, the double-sided YBCO thin films in one turn and...