Review paper
Reducing the Effect of Parasitic Capacitance on the Micro-capacitive Humidity Sensor
Published: Apr 1, 2019
Abstract
It is the most important issue of how the effects of parasitic capacitance can be reduced during the development of micro-capacitive humidity sensor systems. For this purposes, in this paper, step-by-step optimizations were carried out through packaging and circuit to achieve a high-precision, high-stability, and high-repetition humidity sensor system. In order to facilitate the designation and optimization, a MEMS humidity capacitive sensor and...
Paper Details
Title
Reducing the Effect of Parasitic Capacitance on the Micro-capacitive Humidity Sensor
Published Date
Apr 1, 2019
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