Reducing the Effect of Parasitic Capacitance on the Micro-capacitive Humidity Sensor

It is the most important issue of how the effects of parasitic capacitance can be reduced during the development of micro-capacitive humidity sensor systems. For this purposes, in this paper, step-by-step optimizations were carried out through packaging and circuit to achieve a high-precision, high-stability, and high-repetition humidity sensor system. In order to facilitate the designation and optimization, a MEMS humidity capacitive sensor and...