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Lidong Du
Chinese Academy of Sciences
Materials scienceElectronic engineeringWireless sensor networkMicroelectromechanical systemsPressure sensor
55Publications
8H-index
241Citations
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Publications 58
Newest
#1Chenshuo Wang (CAS: Chinese Academy of Sciences)H-Index: 1
#2Xianxiang Chen (CAS: Chinese Academy of Sciences)H-Index: 9
Last. Zhen Fang (CAS: Chinese Academy of Sciences)H-Index: 8
view all 6 authors...
Abstract Objectives Identifying acute exacerbations in chronic obstructive pulmonary disease (AECOPDs) is of utmost importance for reducing the associated mortality and financial burden. In this research, the authors aimed to develop identification models for AECOPDs and to compare the relative performance of different modeling paradigms to find the best model for this task. Methods Data were extracted from electronic medical records (EMRs) of patients with chronic obstructive pulmonary disease ...
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#1Jihang Liu (CAS: Chinese Academy of Sciences)
#2Zhan Zhao (CAS: Chinese Academy of Sciences)H-Index: 12
Last. Lidong Du (CAS: Chinese Academy of Sciences)H-Index: 8
view all 6 authors...
Abstract For achieving the high-performance film bulk acoustic resonator (FBAR) humidity sensor with MEMS process reliability, we proposed a novel FBAR design based on the polyimide film (PI-FBAR). The PI film was employed to provide multifunction for the structural supporting and humidity sensing simultaneously, which was first used in the back-trench FBAR. Due to its flexible and low acoustic impedance characters, it can provide adequate structural robustness and high quality factor (Q=210). A...
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#1Zhan ZhaoH-Index: 12
Last. Ji Jin
view all 5 authors...
To achieve good properties such as the hysteresis, repeatability, stability, linearity and response time in this work, the optimisation processes of the package are presented for a microcapacitive humidity sensor. On the basis of theoretical analysis, the optimisation will be conducted in two ways, including reducing the effect of parasitic capacitance in the microcapacitive humidity sensor measurement system and decreasing the adsorption of water molecules on the package surface. The reduction ...
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#1Jihang Liu (CAS: Chinese Academy of Sciences)
#2Zhan Zhao (CAS: Chinese Academy of Sciences)H-Index: 12
Last. Lidong Du (CAS: Chinese Academy of Sciences)H-Index: 8
view all 8 authors...
Abstract The FBAR sensor can be affected severely by its front-end circuit, especially the phase noise; however, it has rarely been discussed up to now. Herein, we analyze the influence of phase noise in the front-end circuit on an FBAR humidity sensor. A frequency shift detecting system was designed combined with the theoretical calculation and Advanced Design System (ADS) simulation. The available range of frequency shift is seriously influenced by phase noise particularly for its lower limit,...
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#2Zhan ZhaoH-Index: 12
Last. Lidong DuH-Index: 8
view all 5 authors...
Source
#1Zhenyu Liu (CAS: Chinese Academy of Sciences)
#2Lidong Du (CAS: Chinese Academy of Sciences)H-Index: 8
Last. Zhen Fang (CAS: Chinese Academy of Sciences)H-Index: 8
view all 6 authors...
Abstract High precision is an important indicator for the silicon piezoresistive pressure sensor, which is deeply affected by the ambient temperature. This paper presented a chip-level oven-controlled system to operate the silicon piezoresistive pressure sensor at a constant temperature. However, the changes in ambient temperature still affect the temperature of the silicon piezoresistive pressure sensor due to the non-coplanar temperature control and the direct heat transfer between the piezore...
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#1Zhenyu Liu (CAS: Chinese Academy of Sciences)
#2Yichen Pan (CAS: Chinese Academy of Sciences)
Last. Zhen Fang (CAS: Chinese Academy of Sciences)H-Index: 8
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Abstract Aiming at the problem of the nonlinearity and cavity leads of traditional capacitive pressure sensors, a non-coplanar comb electrode structure is proposed. The variation of the overlap areas of comb electrodes reflects the change in capacitance, thereby improving the linearity of the sensor. At the same time, the non-coplanar comb electrodes are designed outside the cavity, avoiding the extra fabrication process caused by the electrode leads. Theoretical analysis and finite element simu...
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#1Lidong Du (CAS: Chinese Academy of Sciences)H-Index: 8
#2Jihang Liu (CAS: Chinese Academy of Sciences)
Last. Zhen Fang (CAS: Chinese Academy of Sciences)H-Index: 8
view all 5 authors...
An optimal drive circuit for the sensitivity-enhanced film bulk acoustic resonator (SE-FBAR) has been presented in this paper. The SE-FBAR is made of a thin ZnO piezoelectric film sandwiched by two electrodes. The drive circuit started with a kind of Parallel Feedback Pierce circuit (common-base Clapp driving circuit) in which the Modified Butterworth-Van Dyke (MBVD) equivalent circuit of FABR is used. By theoretically calculating, it is proved that there is a minimal capacitance that makes the ...
1 CitationsSource
#1Jihang Liu (CAS: Chinese Academy of Sciences)
#2Lidong Du (CAS: Chinese Academy of Sciences)H-Index: 8
Last. Zhanzhao (CAS: Chinese Academy of Sciences)
view all 6 authors...
It is the most important issue of how the effects of parasitic capacitance can be reduced during the development of micro-capacitive humidity sensor systems. For this purposes, in this paper, step-by-step optimizations were carried out through packaging and circuit to achieve a high-precision, high-stability, and high-repetition humidity sensor system. In order to facilitate the designation and optimization, a MEMS humidity capacitive sensor and a discrete capacitance detection PCB circuit were ...
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#2Zhan ZhaoH-Index: 1
Last. Lidong DuH-Index: 8
view all 7 authors...
Wind speed and direction are important parameters in meteorological observation. A solid wind sensor is needed with a small quadcopter for boundary layer meteorological observation. In this paper, the principle of a cylindrical two-dimensional wind sensor is reported and the data from wind tunnel experiments are analyzed. A model is proposed to describe the distribution of the pressure difference across a diameter of a cylinder, and the wind sensor is fabricated with MEMS (Micro-Electro-Mechanic...
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