Growth and Characterization of NbTiN Films Synthesized by Reactive Bias Target Ion Beam Deposition (RBTIBD)

High energy gap Nb-based superconducting alloys with low normal state resistivity are fundamentally important for realization of low-loss high frequency circuits operating above the typical ∼670 GHz gap frequency of elemental Nb. NbTiN has been shown to have a superconducting energy gap nearly twice that of elemental Nb, and is emerging as an important material for various detector and superconducting computing technologies. In this paper, we...