Modified SAMs and templates for achieving self-alignment of full wafers

Volume: 24, Issue: 7
Published: Jun 10, 2020
Abstract
Self-assembly of structures that are more than a few millimeters in size is a current problem that can have broad applications in new ways to construct the objects that we use. As a step in that direction, fluidic self-alignment at the wafer-to-wafer level is demonstrated, characterized, and modeled. Although self-alignment of millimeter-sized objects has previously been shown, several physical processes become important as the structure size is...
Paper Details
Title
Modified SAMs and templates for achieving self-alignment of full wafers
Published Date
Jun 10, 2020
Volume
24
Issue
7
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