Effect of Post Deposition Annealing on the Structural and Electrical Properties of NbTiN Thin Films Deposited by Reactive Bias Target Ion Beam Deposition Technique
Volume: 29, Issue: 5, Pages: 1 - 5
Published: Aug 1, 2019
Abstract
Nb-based superconducting alloys, such as NbN and NbTiN, can have a superconducting energy gap near twice that of elemental Nb, thus, being ideal candidates for low-loss superconducting circuits operating above the gap frequency of Nb. We are particularly interested in these materials for THz-frequency superconducting-insulating-superconducting (SIS) mixers, kinetic inductance detectors, and traveling wave kinetic inductance parametric amplifier...
Paper Details
Title
Effect of Post Deposition Annealing on the Structural and Electrical Properties of NbTiN Thin Films Deposited by Reactive Bias Target Ion Beam Deposition Technique
Published Date
Aug 1, 2019
Volume
29
Issue
5
Pages
1 - 5
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