ANALYSIS OF THE MATERIAL REMOVAL RATE IN MAGNETIC ABRASIVE FINISHING OF THIN FILM COATED PYREX GLASS

The material removal rate (MRR) during precision finishing/polishing is a key factor, which dictates the process performance. Moreover, the MRR or wear rate is closely related to the material/part reliability. For nanoscale patterning and/or planarization on nano-order thickness coatings, the prediction and in-process monitoring of the MRR is necessary, because the process is not characterizable due to size effects and material property/process...