Original paper
ANALYSIS OF THE MATERIAL REMOVAL RATE IN MAGNETIC ABRASIVE FINISHING OF THIN FILM COATED PYREX GLASS
Volume: 24, Issue: Supp01, Pages: 1850004 - 1850004
Published: Oct 31, 2017
Abstract
The material removal rate (MRR) during precision finishing/polishing is a key factor, which dictates the process performance. Moreover, the MRR or wear rate is closely related to the material/part reliability. For nanoscale patterning and/or planarization on nano-order thickness coatings, the prediction and in-process monitoring of the MRR is necessary, because the process is not characterizable due to size effects and material property/process...
Paper Details
Title
ANALYSIS OF THE MATERIAL REMOVAL RATE IN MAGNETIC ABRASIVE FINISHING OF THIN FILM COATED PYREX GLASS
Published Date
Oct 31, 2017
Journal
Volume
24
Issue
Supp01
Pages
1850004 - 1850004
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Notes
History