information about Chemical-mechanical planarization field
Field Hierarchy
| Parent | |||
|---|---|---|---|
Chemistry 29.4M papers | Engineering 25.6M papers | Materials science 19M papers | Organic chemistry 13.1M papers |
Composite material 8.9M papers | Mechanical engineering 5.6M papers | Metallurgy 5M papers | Nanotechnology 4.2M papers |
Layer (electronics) 1.4M papers | Polishing 37.3k papers | ||
| Current | |||
Chemical-mechanical planarization 11.8k papers | |||
| Child | |||
Ammonium dodecyl sulfate 0 papers | Copper damascene 0 papers | ||
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