A Ka-band 3-bit RF MEMS true-time-delay network
Volume: 51, Issue: 1, Pages: 305 - 308
Published: Jan 1, 2003
Abstract
A monolithic Ka-band true-time-delay (TTD) switched-line network containing 12 metal-to-metal contact RF microelectromechanical system switches has been successfully fabricated and characterized on a 75-/spl mu/m-thick GaAs substrate. The compact 9.1-mm/sup 2/ TTD network was designed to produce flat delay time over a dc-to-40-GHz bandwidth with full 360/spl deg/ phase control at 45/spl deg/ intervals at 35 GHz. Measurements show a match to...
Paper Details
Title
A Ka-band 3-bit RF MEMS true-time-delay network
Published Date
Jan 1, 2003
Volume
51
Issue
1
Pages
305 - 308
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