Some practical considerations for effective and efficient wafer-level reliability control

In this paper, some practical considerations for effective and efficient wafer-level reliability control (WLRC) are presented. We propose a better solution to replace the previous method by adding a protection diode to avoid process induced charging damage on test structure devices. This work also provides in-depth discussions on WLR Via electromigration (EM), which correlated well with traditional time-consuming package-level tests. In...