information about Copper damascene field
Copper damascene
Field Hierarchy
| Parent | |||
|---|---|---|---|
Chemical-mechanical planarization 11.8k papers | Copper interconnect 3,350 papers | ||
| Current | |||
Copper damascene papers | |||
| Child | |||
Trends
Notes
History
| Parent | |||
|---|---|---|---|
Chemical-mechanical planarization 11.8k papers | Copper interconnect 3,350 papers | ||
| Current | |||
Copper damascene papers | |||
| Child | |||