The state of coating–substrate interfacial region formed during TiO2 coating deposition by Gas Injection Magnetron Sputtering technique

This manuscript presents the nature of interaction of energetic plasmoids, generated in the Gas Injection Magnetron Sputtering (GIMS) technique, with the surface of substrate or the coating–substrate system. We expected that the plasma generated by a dynamic injection of gas (GIMS) is better ionized than the plasma generated in stationary pressure in its standard range for magnetron sputtering. The GIMS technique operates under conditions that...