Amorphous-to-Nanocrystalline Transition in Silicon Thin Films by Hydrogen Diluted Silane Using PE-CVD Method

Objective: Herein, we report the effect of variation of hydrogen flow rate on the properties of Si:H films synthesized using PE-CVD method. Raman spectroscopy analysis show an increase in crystalline volume fraction and crystallite size implying that hydrogen flow in PE-CVD promotes the growth of crystallinity in nc-Si:H films with an expense of a reduction in deposition rate. Methods: FTIR spectroscopy analysis indicates that hydrogen content...