BEOL-compatible synthesis of multi-layer graphene by carbon ion implantation on cobalt thin films

We present a study on the synthesis of multi-layer graphene using carbon ion implantation on thin cobalt (Co) films. Carbon ions were bombarded at 20 keV and doses of 4 × 1015 cm−2 and 8 × 1015 cm−2 onto the surface of a Co/SiO2/Si substrate. This process was followed by heat treatment (500–900 °C) to form graphene on Co film. The effects of the heating conditions were systematically investigated by micro-Raman spectroscopy and transmission...