Fabrication and Characterization of Carbon Nanotube Microdevices for CO2 Gas Sensing and Other Applications

In this paper, we discuss different types of cost-effective microelectrodes fabricated with the lithography process. The device with interdigitated electrodes is fabricated using Gold (Au) nanoparticles (NPs) decorated semiconducting single-walled carbon nanotubes (SWNTs). We present the fabrication steps including the metal deposition and etching process to fabricate the electrodes. The electrodes are fabricated on the SiO 2 /Si and glass...