Synthesis of Catalyst-Free Al Doped β-Ga₂O₃ Nanorod Arrays on Quartz Substrate by a Simple Chemical Vapor Deposition

The Al doped β -Ga 2 O 3 ( β -Ga 2 O 3 :Al) nanorod arrays with 3.14 at% Al were successfully synthesized on quartz substrate with β -Ga 2 O 3 seed layer by using chemical vapor deposition (CVD) method. The experimental results showed that the β -Ga 2 O 3 seed layer thickness had important effects on alignment of β -Ga 2 O 3 :Al nanorods. At the synthesized temperature of 910 °C, the β -Ga 2 O 3 :Al nanorods were random, uneven length and size...