High-performance β-Ga₂O₃ thickness dependent solar blind photodetector

Gallium oxide (Ga 2 O 3 ) has been studied as one of the most promising wide bandgap semiconductors during the past decade. Here, we prepared high quality β-Ga 2 O 3 films by pulsed laser deposition. β-Ga 2 O 3 films of different thicknesses were achieved and their crystal properties were comprehensively studied. As thickness increases, grain size and surface roughness are both increased. Based on these β-Ga 2 O 3 films, a series of ultraviolet...