Improvement of the microcapacitive humidity sensor by the package optimisation

Volume: 15, Issue: 3, Pages: 145 - 148
Published: Mar 1, 2020
Abstract
To achieve good properties such as the hysteresis, repeatability, stability, linearity and response time in this work, the optimisation processes of the package are presented for a microcapacitive humidity sensor. On the basis of theoretical analysis, the optimisation will be conducted in two ways, including reducing the effect of parasitic capacitance in the microcapacitive humidity sensor measurement system and decreasing the adsorption of...
Paper Details
Title
Improvement of the microcapacitive humidity sensor by the package optimisation
Published Date
Mar 1, 2020
Volume
15
Issue
3
Pages
145 - 148
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