FEM simulation on elastic parameters of porous silicon with different pore shapes

Porous silicon (PSi) seems to be a promising material for acoustic transducers due to its manufacturing ease and high abilities. Yet, the investigation on wave propagation in this porous material is required to enhance the sensitivity. According to Biot’s theory, wave propagation is governed by the porous matrix moduli (i.e. Young’s modulus, bulk modulus, and shear modulus). These parameters as well as Poisson ratios are difficult to measure and...