Optimal Series Resistors for On-Wafer Calibrations

The series resistor (SR) is a common on-wafer device typically used in the series-resistor (SR) calibration and for estimating the capacitance per unit length of coplanar waveguide (CPW) transmission lines. While much work has been done using SRs, this article addresses the design of the resistor itself, considering both its dc resistance value and geometry, and evaluates which resistor is the best resistor. We fabricated 48 different SRs with...