Epitaxial Growth of β-Bi2O3 Thin Films and Particles with Mist Chemical Vapor Deposition
Abstract
Metastable β-Bi2O3 (201) epitaxial thin films and particles were synthesized on α-Al2O3 (0001) single crystal substrates with mist chemical vapor deposition. With increasing synthesis temperature, the morphology of β-Bi2O3 was transformed from flat thin film with root-mean-square roughness of about 1 nm to nano- or micro-particles, in which the thin films and particles showed good crystallinity despite the large lattice mismatch between β-Bi2O3...
Paper Details
Title
Epitaxial Growth of β-Bi2O3 Thin Films and Particles with Mist Chemical Vapor Deposition
Published Date
Oct 30, 2019
Journal
Volume
19
Issue
12
Pages
7170 - 7174
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