Micromachined multigroove silicon ATR FT-IR internal reflection elements for chemical imaging of microfluidic devices
Abstract
The performance of low-cost, microgroove silicon (Si)-based internal reflection elements (μ-groove IREs) for infrared chemical imaging of microfluidic devices is...
Paper Details
Title
Micromachined multigroove silicon ATR FT-IR internal reflection elements for chemical imaging of microfluidic devices
Published Date
Jan 1, 2019
Journal
Volume
11
Issue
45
Pages
5776 - 5783
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Notes
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