Direct evaluation of threading dislocations in 4H-SiC through large-angle convergent beam electron diffraction
Volume: 100, Issue: 2, Pages: 194 - 216
Published: Oct 19, 2019
Abstract
In this study, the structures of threading dislocations (TDs) in a 4H-SiC epilayer were directly characterised using large-angle convergent beam electron diffraction (LACBED) via...
Paper Details
Title
Direct evaluation of threading dislocations in 4H-SiC through large-angle convergent beam electron diffraction
Published Date
Oct 19, 2019
Volume
100
Issue
2
Pages
194 - 216
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