Numerical analysis of the effect of bubble distribution on multiple-bubble behavior

Understanding multiple-bubble behavior in a megasonic field is essential for efficient megasonic nanodevice cleaning without pattern damage. In this study, we numerically studied the effects of equilibrium radius and initial void fraction on multiple-bubble behavior and induced pressure. We analyzed the nonspherical collapse, coalescence, and breakup of bubbles in a megasonic field using a compressible, locally homogeneous model of a gas-liquid...