The property research of the transmission sinusoidal grating with fabrication of LIGA process
Abstract
The transmission sinusoidal grating (TSG) shows a different diffraction pattern with conventional black-white transmission grating (BWTG), which can focus the diffraction energy on a higher order and has been widely used in the spectrum instruments. According to the description of the scalar diffraction theory, the numerical simulation for diffraction properties of the TSG has been studied for years. However, the fabrication of the TSG is...
Paper Details
Title
The property research of the transmission sinusoidal grating with fabrication of LIGA process
Published Date
Sep 1, 2019
Journal
Volume
15
Issue
5
Pages
335 - 338
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