SiGe nano-heteroepitaxy: An investigation of the nano-template

In this paper, we have evaluated the impact of the nano-template used for the nano-heteroepitaxy of SiGe layers in a 300 mm industrial Reduced Pressure-Chemical Vapour Deposition tool. A process flow based on diblock copolymer patterning was used to fabricate honeycombed nanometer-sized templates. Various integration schemes were designed in order to measure the impact of pitch, the presence (or not) of the nano-template during coalescence and...