Microwave plasma and rapid thermal processing of indium-tin oxide thin films for enhancing their performance as transparent electrodes

Indium-tin oxide (ITO) is widely used as a transparent electrode for optoelectronic devices given its large transparency and high conductivity. However, the particular properties of this material greatly depend on the overall fabrication process. We report on the effect of four different postfabrication processes on ITO thin films grown by electron beam evaporation. More specifically, the effect on the overall properties of the evaporated ITO...