CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures
Abstract
We demonstrate a platform for phase and amplitude modulation in silicon nitride photonic integrated circuits via piezo-optomechanical coupling using tightly mechanically coupled aluminum nitride actuators. The platform, fabricated in a CMOS foundry, enables scalable active photonic integrated circuits for visible wavelengths, and the piezoelectric actuation functions without performance degradation down to cryogenic temperatures. As an example...
Paper Details
Title
CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures
Published Date
Sep 20, 2019
Journal
Volume
27
Issue
20
Pages
28588 - 28588
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