Deep Electrode and Parylene E-Based Capacitive VOC Detector for Micro Gas Chromatograph Application

This paper presents a capacitive volatile organic compound (VOC) detector with parylene E-coated high-aspect-ratio (HAR) deep electrodes, which opens up a new design framework for high-sensitivity and low limit-of-detection detectors with low power consumption. From evaluations of the VOC sensing performance in steady-state flow, the sensitivity of the HAR detector achieves 48 times higher than that of the planar type with the same width and...