Small Size And Highly Sensitive Differential MEMS Accelerometer Based On Double-Ended Tuning Fork Resonators

Here, a frequency modulated MEMS accelerometer encapsulated in vacuum is presented. The small size (0.25 mm ² ) and the capability of encapsulation at low pressures (≈ 150 Pa) are the main advantages reported. A high sensitivity (85 Hz/g) for a single double-ended tuning fork (DETF) resonator is achieved due to the addition of a force...