Original paper
Removal of fine particles from IC chip carbonization process in a rotating packed bed: Modeling and assessment
Abstract
A high-gravity rotating packed bed (HiGee RPB) is very efficient at removing pollution because it exerts a strong high centrifugal and allows tiny droplets to form, which allows the control of gaseous and particulate air pollution. In this study, fine particles that are removed from integrated circuit (IC) chip carbonization process using a RPB are evaluated under different high gravity factors and liquid-to-gas ratios. The greatest number of...
Paper Details
Title
Removal of fine particles from IC chip carbonization process in a rotating packed bed: Modeling and assessment
Published Date
Jan 1, 2020
Journal
Volume
238
Pages
124600 - 124600
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Notes
History